SH-110
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The Agilent SH-110 is a dry, hermetic scroll pump with industry-leading features designed for easy integration into original-equipment manufacturer (OEM) systems. This single-stage pump has a pumping speed of 110 liters/minute (on 60 Hz power) and an ultimate pressure of 50 mtorr (0.07 mbar) in a compact package that is ideal for many end-user applications.
The SH-110 pump conforms to European Union directives (CE), Canadian Standards Authority (CSA), and Semi S2-0200 requirements.
The SH-110 pump conforms to European Union directives (CE), Canadian Standards Authority (CSA), and Semi S2-0200 requirements.
- Low-temperature operation
- ¼-horsepower motor for low power consumption
- Built-in exhaust valve for low noise levels
- Moveable exhaust port for flexibility in tight spaces
- High pumping speed (110 liters/minute) at high pressure for fast pumpdown
- Lightweight; convenient carrying handle
- Built-in fail-safe isolation valve protects the vacuum system
- Universal 100-230 VAC power for easy installation worldwide
Technical Specifications
Pumping Speed Graph
Outline Drawing
| Peak pumping speed (60 Hz) | 110 L/m, 6.6 m³/hr, 4.0 cfm |
| Peak pumping speed (50 Hz) | 90 L/m, 5.4 m³/hr, 3.3 cfm |
| Ultimate pressure | 5.0 × 10-2 torr (6.6 × 10-2 mbar) |
| Maximum inlet pressure | 1 atmosphere (0 psig) |
| Maximum outlet pressure | 1.5 atmosphere (7.5 psig) |
| Inlet connection | NW25 KF flange |
| Exhaust connection | 1⁄4-in. female nat’l pipe thread |
| Exhaust connection adapter | NW16 KF adapter provided |
| Gas ballast connection | 1⁄8-in. female nat’l pipe thread |
| Ambient operating temperature | 5 to 40 °C (41 to 104 °F) |
| Storage temperature | –20 to 60 °C (–4 to 140 °F) |
| Motor rating | 0.25 horsepower (0.19 kW) |
| Supply power |
1 phase, 50-60 Hz, 100-115/200-230 VAC |
| Motor thermal protection | Automatic |
| Rotation speed |
1725 RPM at 60 Hz 1425 RPM at 50 Hz |
| Cooling | Air-cooled |
| Weight | 19.5 kg (43 lbs) |
| Restrictions | No corrosive, explosive, or particulate-forming gases |
| Leak rate (exhaust sealed) | <1 × 10-7 std-cc/sec helium |
| Compliances | Conforms with CE, CSA, and Semi S2-2000 |
Pumping Speed Graph
Outline Drawing
| Description | |
| SH-110 single-scroll pump | SH01101UNIV |
| Tip seal replacement kit | SH0110TS |
| Exhaust silencer kit | SH0110EXSLR |
| Power Cord Selection | |
| Europe, 10 A, 220-230 VAC, 2.5 meter | 656494220 |
| Denmark, 10 A, 220-230 VAC, 2.5 meter | 656494225 |
| Switzerland, 10 A, 230 VAC, 2.5 meter | 656494235 |
| UK/Ireland, 13 A, 230 VAC, 2.5 meter | 656494250 |
| India, 10 A, 220-250 VAC, 2.5 meter | 656494245 |
| Israel, 10 A, 230 VAC, 2.5 meter | 656494230 |
| Japan, 12 A, 100 VAC, 2.3 meter | 656494240 |
| North America, 15 A, 125 VAC, 2.0 meter | 656458203 |
| North America, 10 A, 230 VAC, 2.5 meter | 656494255 |
