All-Metal UHV Valves Series 54

All-Metal UHV Valves Series 54

Share:


All-Metal UHV Valves Series 54

Agilent is pleased to offer Series 54 All-Metal Ultra High Vacuum Valves in partnership with VAT. These valves are specially designed for use in ultra-high vacuum systems where bake-out temperatures up to 300º C preclude the use of elastomers and low melting temperature metals. The valves are manually operated with a standard Hex wrench, so no Torque Wrench is required. Thanks to the “hard-on-hard” metal seals, these valves can be operated thousands of times before requiring maintenance. Series 54 valves require very little maintenance with maximum reliability and vacuum sealing from atmospheric pressure to below 10-11 torr (mbar).

  • Fully metal valves designed specifically for Ultra-High Vacuum (UHV)
  • Compatible with pressures from XHV up to 2 bar
  • Bakeable up to 300 Degrees C in open and closed position
  • Unique VATRING seal provides "hard on hard" contact seal, giving more than 1000 closures before maintenance
  • May be mounted in any orientation
  • Visual position indication
Leak rate: valve body, valve seat < 1 x 10-10 mbar Is-1
Pressure range XHV to 2 bar (abs)
Differential pressure on the gate ≤ 2 bar
Differential pressure at opening ≤ 1 bar 1
Lifetime ≥ 1000 cycles
Bake-out temperature 2 ≤ 300 °C open and closed
Heating and cooling rate = 60 °C h-1
Material: valve body, mechanism, bellows AISI 316L (1.4404, 1.4435)
Seal: bonnet, plate metal
Feedthrough bellows
Mounting orientation any
Valve position indication visual (mechanical)
Conductance (molecular flow) NW 16: 5 ls-1 / NW 40: 50 ls-1
Closing force closes at a mechanical stop
Weight: kg (lbs) NW 16: 0.4 (0.9)
 
NW 40:1.9 (4.2)
1) > 1 bar with reduced number of cycles
 
2) Maximum values: depending on operating conditions and sealing materials

Description UHV All Metal Valves Part Number Valve, ¾ Metal/Mini CFF X3202-60097 Valve, All-Metal, 1 ½”, RT-Angle X3202-60098 Spare Parts Part Number Seal Kit, 1st Replacement, UHV Series 54, ¾” X3202-60107 Seal Kit, 2nd Replacement, UHV Series 54, ¾” X3202-60109 Seal Kit, 1st Replacement, UHV Series 54, 1½” X3202-60108 Seal Kit, 2nd Replacement, UHV Series 54, 1½” X3202-60110