All-Metal UHV Valves Series 54
- Fully metal valves designed specifically for Ultra-High Vacuum (UHV)
- Compatible with pressures from XHV up to 2 bar
- Bakeable up to 300 Degrees C in open and closed position
- Unique VATRING seal provides "hard on hard" contact seal, giving more than 1000 closures before maintenance
- May be mounted in any orientation
- Visual position indication
Leak rate: valve body, valve seat | < 1 x 10-10 mbar Is-1 |
Pressure range | XHV to 2 bar (abs) |
Differential pressure on the gate | ≤ 2 bar |
Differential pressure at opening | ≤ 1 bar 1 |
Lifetime | ≥ 1000 cycles |
Bake-out temperature 2 | ≤ 300 °C open and closed |
Heating and cooling rate | = 60 °C h-1 |
Material: valve body, mechanism, bellows | AISI 316L (1.4404, 1.4435) |
Seal: bonnet, plate | metal |
Feedthrough | bellows |
Mounting orientation | any |
Valve position indication | visual (mechanical) |
Conductance (molecular flow) | NW 16: 5 ls-1 / NW 40: 50 ls-1 |
Closing force | closes at a mechanical stop |
Weight: kg (lbs) |
NW 16: 0.4 (0.9)
|
1) > 1 bar with reduced number of cycles
|
Description UHV All Metal Valves Part Number Valve, ¾ Metal/Mini CFF X3202-60097 Valve, All-Metal, 1 ½”, RT-Angle X3202-60098 Spare Parts Part Number Seal Kit, 1st Replacement, UHV Series 54, ¾” X3202-60107 Seal Kit, 2nd Replacement, UHV Series 54, ¾” X3202-60109 Seal Kit, 1st Replacement, UHV Series 54, 1½” X3202-60108 Seal Kit, 2nd Replacement, UHV Series 54, 1½” X3202-60110